Micromachining
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THE INFORMATION ON THIS PAGE WAS LAST UPDATED IN 2002.  ALL INFORMATION FOR THIS CLASS IS NOW DISTRIBUTED ON THE WEBCT SYSTEM MAINTAINED BY THE UNIVERSITY OF UTAH.

BIOEN 6421, ELEN 5221 and 6221,and MEEN 5960 and 6960

Here you will find documents and notes related to this class (All documents in PDF format).

Go to:  Project Info        Labs        Lectures

Need to find Dr. Gale? Use e-mail.
E-mail: gale@mech.utah.edu

The class is being taught this semester in EMCB 103 from 2:00 to 2:50 PM on Tuesday and Thursday.  This class also includes a lab.

The textbook for the class is Introduction to Microfabrication, by Mark Madou, CRC Press.

Syllabus and Schedule

 

PROJECT INFORMATION

PROJECT REPORTS ARE DUE BY THE END OF THE WORKING DAY ON FRIDAY, MAY 3 IN THE MECHANICAL ENGINEERING OFFICE, MEB 2202.  YOU MAY SUBMIT YOUR REPORT BY E-MAIL.  PLEASE TURN IN YOUR LAB NOTEBOOKS AND HOMEWORK 3 AT THE ME OFFICE ALSO.

Proposal Guidelines     FINAL REPORT GUIDELINES

Project Deadlines and Components        Customer Needs and Functional Specs

Poster Tips        Project and Poster Grading Sheets     POSTER GUIDELINES

SAMPLE PROJECT ASSIGNMENTS/LITERATURE SEARCH

MEMS Clearinghouse Web Site        Marriott Library Search Engines        Compendex

Sample Literature Review  (Yours does not need to be quite as extensive)

Sample Customer Needs and Functional Specs       Sample Modeling and Scaling        Sample Mask Layout

APPENDIX B IN YOUR TEXTBOOK GIVES HUNDREDS OF WEBPAGES THAT MAY BE USEFUL TO YOU IN CHOOSING TOPICS

HOMEWORK INFORMATION

Homework 1

Homework 2    Solutions to some Homework 2 Problems

Homework 3  NEW!!!

LAB NOTES

Lab TA E-mail:  Ameya Kantak    Himanshu Sant    Layne Williams     David Chang-yen

Lab Section Assignments    MASK GENERATION SUGGESTIONS

Lab 1 Safety Lecture 
Lab 2 Photolithography
Lab 3 Wet Oxidation
Lab 4 Pattern Generation
Lab 5 E-Beam Deposition
Lab 6 KOH etching and RIE
Lab 7 Soft Lithography
Lab 8 Electroplating
Lab 9-12 Project Work

LECTURE NOTES
Lecture 1 Jan. 3 Overview of MEMS
Lecture 2 Jan. 8 MEMS Chemistry     DI Water
Lecture 3 Jan. 10 Clean Rooms (NEW)      Vacuum Systems
Lecture 4 Jan. 15 Photolithography(UW)        Positive Resists(UW)        Negative Resists(UW)        Exposure(UW)        Photolithography(Texas)
Lecture 5 Jan. 17 Mask Design
Lecture 6 Jan. 22 Materials Science for MEMS     Crystal Planes
Lecture 7 Jan. 24 CVD and Oxidation     Diffusion
Lecture 8 Jan. 29 Dry Etching     Etch Rates
Lecture 9 Jan. 31 Exam 1     Exam 1 Review Sheet
Lecture 10 Feb. 28 Wet Etching
Lecture 11 Mar. 5 Physical Vapor Deposition
  Mar. 7 NO CLASS.  PARALYMPIC OPENING CEREMONIES.
Lecture 12 Mar. 12 Electrodeposition
Lecture 13 Mar. 14 Nontraditional Micromachining Techniques
Lecture 14 Mar. 19 LIGA    Polymers Microfabrication
Lecture 15 Mar. 21 Bonding     Packaging
Lecture 16 Mar. 26 Integration     Packaging for Microfluidics and Optics
Lecture 17 Mar. 28 CAD for MEMS
Lecture 18 Apr. 2 MEMS Metrology
Lecture 19 Apr. 4 Exam 2     Exam 2 Review Sheet
Lecture 20 Apr. 9 Optical MEMS
Lecture 21 Apr. 11 Mechanical MEMS
Lecture 22 Apr. 16 RF, Electrical, and Magnetic MEMS
Lecture 23 Apr. 18 Chemical Microsystems
Lecture 24 Apr. 23 Microfluidics
Lecture 25 Apr. 25 Biochips    BioMEMS    Drug Delivery    Tissue Engineering
Lecture 26 Apr. 30 Nanotechnology
Lecture 27 May 2 Poster Session in EMCB Lobby
  May 8 Final Exam from 1-3 PM     Review Sheet

All documents and materials © Bruce Gale 2002, unless otherwise noted. May be used for noncommercial home, classroom, and personal use.

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