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| Name | Last modified | Size | Description |
|---|---|---|---|---|
| Parent Directory | - | ||
| Diffusion.pdf | 2004-05-12 15:09 | 58K | |
| Exam 1 Review Sheet ..> | 2004-05-12 15:09 | 37K | |
| Exam 2 Review Sheet.pdf | 2004-05-12 15:09 | 5.6K | |
| Final Exam Review Sh..> | 2004-05-12 15:09 | 6.7K | |
| Final Report Guideli..> | 2004-05-12 15:09 | 8.2K | |
| Homework 1.pdf | 2004-05-12 15:09 | 44K | |
| Lab 01 Safety.pdf | 2004-05-12 15:10 | 523K | |
| Lab 02 Photolithogra..> | 2004-05-12 15:10 | 6.1K | |
| Lab 03 Wet Oxidation..> | 2004-05-12 15:10 | 5.2K | |
| Lab 04 Pattern Gener..> | 2004-05-12 15:10 | 10K | |
| Lab 05 E-Beam Deposi..> | 2004-05-12 15:10 | 12K | |
| Lab 06 KOH etching a..> | 2004-05-12 15:10 | 13K | |
| Lab 07 Soft Lithogra..> | 2004-05-12 15:10 | 7.3K | |
| Lab 08 Electroplatin..> | 2004-05-12 15:10 | 26K | |
| Lab 09-12 Projects.pdf | 2004-05-12 15:10 | 7.6K | |
| Lab Section Assignme..> | 2004-05-12 15:10 | 4.0K | |
| Lecture 01 Introduct..> | 2004-05-12 15:10 | 494K | |
| Lecture 02 Chemistry..> | 2004-05-12 15:10 | 35K | |
| Lecture 02 DIWater.pdf | 2004-05-12 15:10 | 16K | |
| Lecture 03 Clean Roo..> | 2004-05-12 15:10 | 192K | |
| Lecture 03 Vacuum Sy..> | 2004-05-12 15:11 | 185K | |
| Lecture 05 Ji Fang M..> | 2004-05-12 15:11 | 853K | |
| Lecture 06 Materials..> | 2004-05-12 15:12 | 1.2M | |
| Lecture 07 CVD and O..> | 2004-05-12 15:12 | 265K | |
| Lecture 08 Dry Etchi..> | 2004-05-12 15:13 | 1.6M | |
| Lecture 10 Wet Etchi..> | 2004-05-12 15:14 | 486K | |
| Lecture 11 PVD.pdf | 2004-05-12 15:14 | 322K | |
| Lecture 12 Electrode..> | 2004-05-12 15:14 | 105K | |
| Lecture 13 Other Mic..> | 2004-05-12 15:14 | 632K | |
| Lecture 15 LIGA.pdf | 2004-05-12 15:17 | 4.0M | |
| Lecture 15 Polymers ..> | 2004-05-12 15:17 | 656K | |
| Lecture 16a Bonding.pdf | 2004-05-12 15:17 | 159K | |
| Lecture 16b MEMS Pac..> | 2004-05-12 15:18 | 582K | |
| Lecture 17a Microele..> | 2004-05-12 15:18 | 755K | |
| Lecture 17b Packagin..> | 2004-05-12 15:20 | 2.7M | |
| Lecture 18 MEMS CAD.pdf | 2004-05-12 15:22 | 2.4M | |
| Lecture 19 MEMS Metr..> | 2004-05-12 15:23 | 2.4M | |
| Lecture 21 Optical M..> | 2004-05-12 15:25 | 2.9M | |
| Lecture 22 Mechanica..> | 2004-05-12 15:26 | 1.1M | |
| Lecture 23 Electrica..> | 2004-05-12 15:27 | 1.4M | |
| Lecture 24 Chemical ..> | 2004-05-12 15:29 | 3.3M | |
| Lecture 25 Microflui..> | 2004-05-12 15:31 | 3.8M | |
| Lecture 26a BioMEMS.pdf | 2004-05-12 15:33 | 2.5M | |
| Lecture 26b BioMEMS.pdf | 2004-05-12 15:35 | 3.8M | |
| Lecture 26c BioMEMS.pdf | 2004-05-12 15:36 | 1.6M | |
| Lecture 26d BioMEMS.pdf | 2004-05-12 15:39 | 4.3M | |
| Lecture 27 Nanotechn..> | 2004-05-12 15:40 | 1.1M | |
| Mask Layout Example.pdf | 2004-05-12 15:40 | 8.8K | |
| Mask Problems.pdf | 2004-05-12 15:40 | 5.2K | |
| Poster Award Sheet.pdf | 2004-05-12 15:40 | 3.4K | |
| Poster Grading Sheet..> | 2004-05-12 15:40 | 36K | |
| Poster Guidelines.pdf | 2004-05-12 15:40 | 7.5K | |
| Practice Problems 2.pdf | 2004-05-12 15:42 | 8.2K | |
| Practice Problems 2 ..> | 2004-05-12 15:42 | 115K | |
| Project Due Dates.pdf | 2004-05-12 15:42 | 51K | |
| Proposal Guidelines.pdf | 2004-05-12 15:42 | 46K | |
| Syllabus 2002 Utah M..> | 2004-05-12 15:42 | 18K | |
| WS_FTP.LOG | 2004-05-12 15:42 | 1.2K | |
| _vti_cnf/ | 2004-05-12 15:43 | - | |
| crystal.pdf | 2004-05-12 15:09 | 15K | |
| etch rates.pdf | 2004-05-12 15:09 | 11K | |
| exposred.pdf | 2004-05-12 15:09 | 30K | |
| manufspecs.pdf | 2004-05-12 15:40 | 402K | |
| microgear.gif | 2004-05-12 15:40 | 89K | |
| microlithtexred.pdf | 2004-05-12 15:40 | 129K | |
| negresred.pdf | 2004-05-12 15:40 | 54K | |
| photolithred.pdf | 2004-05-12 15:40 | 34K | |
| posresred.pdf | 2004-05-12 15:40 | 56K | |
| postertips.pdf | 2004-05-12 15:42 | 1.7M | |